2311 Development of an Active Vibration Canceling and Damping System Using Inertial Force Generator

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  • 2311 慣性力発生装置を用いたアクティブ消振・制振システムの開発(免振・除振装置および振動試験機(2))

Abstract

Recently, we have developed a new active vibration canceling system that can cancel undesired vibration caused by stage motion installed on the isolation table. However, since the system has to equip both vibration canceling devices and active vibration isolation devices which give damping to the system, the system itself becomes very expensive. For this reason, we propose a new vibration control device that can cancel vibration caused by the stage motion and also give damping to the system effectively, by using only the canceling devices. In this vibration control system, the active vibration isolation devices are not required, then the system becomes simple and inexpensive. In order to design high performance controller for this system, the exact plant model is required. However it is difficult to get the accurate plant model using conventional identification technique, because the plant is a multi-input multi-output complicated system. In this paper, firstly high performance experimental results of the vibration canceling system is introduced. Then, a new identification method is proposed utilizing well-known experimental modal analysis technique, and some very good identification results are shown.

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