21720 誘電泳動による局所流動形成(流動,OS.12 機械工学が支援する微細加工技術(半導体・MEMS・NEMS))  [in Japanese] 21720 Local Flow Filed Formation with Dielectrophoresis  [in Japanese]

Local velocities of micro particles induced with dielectrophoresis (DPE) are measured to investigate fundamental characteristics of the local migration of particles. Dielectrophoresis is the phenomenon of a force induced on micro particles in a non-uniform electric field. It has a great advantage to manipulate micro-nanoscale particles as well as biological cell for biotechnology and nanotechnology. Furthermore, this local particles migration can generate local flow to form intelligent flow field which is useful for novel self-assembled micro fabrication technique and micro fluidics for micro medical and biological implements. In this study, the local velocities of particles are measured with the particle tracking technique in a micro channel. It is confirmed that the local particle velocities depend on the electric field intensity, the frequency and the position of the particle on the non uniform electric field. And the possibility of generating a local flow to form intelligent flow field with the migration of particles is discussed.