3301 ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム(J26-1 マイクロメカトロニクス(1),J26 マイクロメカトロニクス) 3301 A Micro-fluidic system using LiNbO_3 Surface Acoustic Wave

This paper describes a novel surface acoustic wave (SAW) micro fluidic pump fabricated on a micro channel wall made of LiNbO_3 to reduce fluid friction. The micro-fluidic pump and micro channel were designed, fabricated and integrated as a micro-fluidic system for liquid mixing and reaction. We successfully demonstrated controlled flow rate by varying the input voltage as well as controlled ejection of fluid. It was proved that the SAW pump having the resonant frequency of 19.9MHz fabricated onto a micro channel wall of LiNbO_3 substrate was successfully operated at wide flow rate range up to 0.7μl/min..