Read/Search this Article
Abstract
High-mesa waveguides have been fabricated for a compact infrared sensing system, as they have a benefit of having optical evanescent field outside of their solid waveguides and thus this contributes to the sensing of gas or liquid in a compact area. By using 6mm SOI-based Si/SiO_2 high-mesa waveguide with waveguide width of 0.7μm, we could successfully obtain sufficient infrared absorption for the first time, therefore, this proved that the proposed waveguide had an optical field outside of the waveguide.
Journal
- Technical report of IEICE. OPE [List of Volumes]
-
Technical report of IEICE. OPE 108(260), 107-111, 2008-10-16 [Table of Contents]
The Institute of Electronics, Information and Communication Engineers