@article{YAMAZAKIHiroshi:2009-01-22, author="YAMAZAKI, Hiroshi and OGAWA, Ikuo and YANAGISAWA, Masahiro and WATANABE, Kei and KANEKO, Akimasa", title="Fabrication of micromirror array embedded in PLC and stacked integration of in-line power monitor", journal="Technical report of IEICE. LQE", ISSN="09135685", publisher="The Institute of Electronics, Information and Communication Engineers", year="2009", month="jan", volume="108", number="419", pages="155-158", URL="http://ci.nii.ac.jp/naid/110007123664/en/", DOI="", }