2-3 Si基板の異方性エッチングのZnO膜圧電共振子への応用(一般講演)  [in Japanese] 2-3 Piezoelectric Composite Resonators Consisting of ZnO Films on Anisotropically Etched Silicon Substrates  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (1), 63-64, 1980-12-15  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

Preview

Preview

Codes

  • NII Article ID (NAID) :
    110007459567
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS