2-11 新しい活性化マグネトロンスパッタ法によるZnO,AlN圧電厚膜の高速作成(一般講演)  [in Japanese] 2-11 High Rate Deposition of Thick Piezoelectric ZnO, AlN Films Using New Magnetron Sputtering Techniques  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (1), 79-80, 1980-12-15  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007459575
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS