C-5 Si基板上に作製したPbTiO_3薄膜マイクロ超音波センサ(超音波の発生・検出)  [in Japanese] C-5 Micro Ultrasonic Sensor of PbTiO_3 Thin Film Fabricated on Si Wafer  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (4), 71-72, 1983-12-06  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007459786
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS