P-19 スパッタエッチングによるSAWデバイスの周波数調整(ポスター・セッション)  [in Japanese] P-19 Frequency Trimming of SAW Devices by Sputter Etching  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (6), 85-86, 1985-12-10  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007459934
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS