B-3 透明トランスジューサを用いた光音響分光法(PAS)によるイオン打ち込みしたSiの評価(ポスターセッション)  [in Japanese] B-3 Evaluation Of Ion Implantation Into Silicon by Photoacoustic Spectroscopy (PAS) Using Transparent Transducer  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (8), 31-32, 1987-12-08  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007460060
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS