E-10 電子線超音波顕微鏡によるSi Tr-Chipの拡散層の検出(超音波顕微鏡)  [in Japanese] E-10 Imaging of Diffused Regions in a Si Tr-Chip by Electron-Acoustic Microscopy  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (9), 163-164, 1988-12-07  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007460216
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS