F3 直線集束ビーム超音波顕微鏡によるSAWデバイス用LiNbO_3およびLiTaO_3ウェハの評価  [in Japanese] F3 Quantitative evaluation of LiNbO_3 and LiTaO_3 wafers for SAW devices by line-focus-beam acoustic microscopy  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (12), 209-210, 1991-12-02  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007460335
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS