3G-2 MeV Siイオン注入Siのビーム音響法による評価(超音波顕微鏡)  [in Japanese] 3G-2 Evaluation of MeV Si implanted Si by using beam acoustic method  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (11), 172-173, 1990-11-20  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007460426
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS