PA25 光音響分光法によるGaAsウエハのEL2の面分布の測定(ポスターセッションA) [in Japanese] PA25 Spatial distribution of EL2 in GaAs wafer by the photoacoustic spectroscopy [in Japanese]

- 福山敦彦 Fukuyama A.
- 宮崎大工 Department of Electronics, Miyazaki Univ.
- 碇哲雄 Ikari T.
- 宮崎大工 Department of Electronics, Miyazaki Univ.
- 前田幸治 Maeda K.
- 宮崎大工 Department of Electronics, Miyazaki Univ.
- 二神光次 Futagami K.
- 宮崎大工 Department of Electronics, Miyazaki Univ.

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Journal

Symposium on ultrasonic electronics [List of Volumes]

Symposium on ultrasonic electronics (13), 81-82, 1992-11-30 [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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NII Article ID (NAID) :
110007460478
NII NACSIS-CAT ID (NCID) :
AN10578660
Text Lang :
JPN
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NII-ELS