H2 1次元熱伝導モデルに基づいたSiウェハ上クラックの光音響検出シミュレーション(光音響技術) [in Japanese] H2 Simulation of Photoacoustic Detection of Microcracks on Silicon Wafers Based on One-Dimensional Thermal-Diffusion Model [in Japanese]

- 中田俊彦 Nakata Toshihiko
- 日立生研 Production Engineering Research Laboratory, Hitachi, Ltd.
- 小林イラリオ治臣 Kobayashi Hilario Haruomi
- 日立生研 Production Engineering Research Laboratory, Hitachi, Ltd.
- 北森武彦 Kitamori Takehiko
- 東大工 Department of Industrial Chemistry, the University of Tokyo
- 澤田嗣郎 Sawada Tsuguo
- 東大工 Department of Industrial Chemistry, the University of Tokyo

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Symposium on ultrasonic electronics [List of Volumes]

Symposium on ultrasonic electronics (13), 243-244, 1992-11-30 [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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NII Article ID (NAID) :
110007460557
NII NACSIS-CAT ID (NCID) :
AN10578660
Text Lang :
JPN
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