J4 ポリイミド/ZnO/Si_3N_4膜におけるラム波の感湿特性(センサー) [in Japanese] J4 Humidity Sensitivity of Lamb-Wave on Composite Polyimide/ZnO/Si_3N_4 Structure [in Japanese]

- 佐藤学 Sato M.
- 石巻専修大学理工 Faculty of Science and Engineering, Ishinomaki Senshu University
- 山本達夫 Yamamoto T.
- 石巻専修大学理工 Faculty of Science and Engineering, Ishinomaki Senshu University
- 竹内正男 Takeuchi M.
- 東北大通研 Research Institute of Electrical Communication, Tohoku University
- 山之内和彦 Yamanouchi K.
- 東北大通研 Research Institute of Electrical Communication, Tohoku University

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Symposium on ultrasonic electronics [List of Volumes]

Symposium on ultrasonic electronics (13), 261-262, 1992-11-30 [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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NII Article ID (NAID) :
110007460565
NII NACSIS-CAT ID (NCID) :
AN10578660
Text Lang :
JPN
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