B2 超高周波平面超音波による精密機械系の移動特性評価法 : 直線集束ビーム超音波顕微鏡への適用(超音波測定技術)  [in Japanese] B2 A measurement method of movement characteristics of precision mechanical-translation stages using ultrasonic plane waves and its application to a z-stage of the line-focus-beam acoustic microscope  [in Japanese]