PG2 低応力窒化ケイ素薄膜によるカンチレバーの共振法を用いた弾性特性評価(ポスターセッション1)  [in Japanese] PG2 Evaluation of Elastic Properties of Low Stress Silicon Nitride Cantilever using Resonant Frequency Analysis  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (17), 57-58, 1996-10-23  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007461033
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS