OB4 対向ターゲットスパッタ法による圧電性ZnO薄膜の作製(圧電材料)  [in Japanese] OB4 Deposition of Piezoelectric ZnO Thin Film by Target Facing Type of Sputtering Method  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (17), 101-102, 1996-10-23  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007461055
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS