OD1 両端自由型捩り水晶振動子を用いた膜厚モニター用センサ(バルク波デバイス)  [in Japanese] OD1 A Sensor for Thin Film Thickness Monitor Using Torsional Quartz Crystal Resonators of Free-Free Bar Type  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (18), 17-18, 1997-11-12  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007461192
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS