PE-12 Detection of defects in micro-machine elements using acoustic wavesgenerated by phase velocity scanning of laser interference fringes

PE-12 レーザー干渉縞の位相速度走査法による弾性波を用いたマイクロマシン構造要素の欠陥検出 [in Japanese] PE-12 Detection of defects in micro-machine elements using acoustic wavesgenerated by phase velocity scanning of laser interference fringes [in Japanese]

- 佐藤治道 Sato Harumichi
- 機械技研 Mechanical Engineering Laboratory
- 松本壮平 Matsumoto Sohei
- 機械技研 Mechanical Engineering Laboratory
- 小木曽久人 Ogiso Hisato
- 融合研:機械技研 National Institute for Advanced Interdisciplinary Research:Mechanical Engineering Laboratory
- 長秀雄 Cho Hideo
- 東北大 Tohoku University
- 山中一司 Yamanaka Kazushi
- 東北大 Tohoku University

Symposium on ultrasonic electronics [List of Volumes]

Symposium on ultrasonic electronics (20), 215-216, 1999-11-17 [Table of Contents]

Steering committee of symposium on ultrasonic electronics