E-4 超音波原子間力顕微鏡によるSi加工変質層の評価  [in Japanese] E-4 Evaluation of machining damage of Si by ultrasonic atomic force microscope  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (20), 287-288, 1999-11-17  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

Preview

Preview

Codes

  • NII Article ID (NAID) :
    110007461596
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS