3-I-3 ZnO圧電薄膜を用いた圧カセンサー(I.圧電応用デバイス・振動子)  [in Japanese] 3-I-3 Silicon Micromachined Vacuum Gauge using ZnO Thin Film  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (10), 205-206, 1989-11-07  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

Preview

Preview

Codes

  • NII Article ID (NAID) :
    110007463953
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS