OE05 PZT薄膜を用いた形状測定用加振形プローブセンサの設計と評価(バルク波デバイス)  [in Japanese] OE05 Design and evaluation of the touch probe sensor for the surface profile measurement using PZT thin film  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (21), 49-50, 2000-11-06  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007463979
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS