QG05 超音波振動子を利用した超高真空対応回転導入機の試作(ポスターセッションII)  [in Japanese] QG05 Rotational feedthrough using ultrasonic vibration transducer for ultra-high vacuum condition  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (21), 271-272, 2000-11-06  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007464090
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS