B-4 リニア型高速熱処理法を用いたTa_2O_5薄膜の作成と圧電性評価(材料・計測,口頭発表)  [in Japanese] B-4 Fabrication of Ta_2O_5 Piezoelectric thin film by using Linear Rapid Thermal Annealing and measurement of piezoelectricity  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (22), 17-18, 2001-11-07  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007464156
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS