P3-10 高耐圧PZT薄膜を用いたダイアフラム型アクチュエータに要求される圧電層厚さの基礎的検討(ポスターセッション3,ポスター発表) P3-10 What thickness of piezoelectric layer with high breakdown voltage is required for diaphragm type actuator?

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (22), 299-300, 2001-11-07  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007464297
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    ENG
  • Databases :
    NII-ELS