P3-45 超音波モータを利用した回転導入器の真空中の駆動特性(ポスターセッション3,ポスター発表)  [in Japanese] P3-45 Dynamic Characteristics of UHV Compatible Feedthrogh Using Ultrasonic Motor  [in Japanese]

Journal

Symposium on ultrasonic electronics   [List of Volumes]

Symposium on ultrasonic electronics (22), 369-370, 2001-11-07  [Table of Contents]

Steering committee of symposium on ultrasonic electronics

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Codes

  • NII Article ID (NAID) :
    110007464332
  • NII NACSIS-CAT ID (NCID) :
    AN10578660
  • Text Lang :
    JPN
  • Databases :
    NII-ELS