MEMS等価回路ジェネレータの開発(プロセス・デバイス・回路シミュレーション及び一般)  [in Japanese] Development of MEMS Equivalent Circuit Generator  [in Japanese]

CMOS-MEMS(micro electromechanical system)デバイスの設計効率向上のために「等価回路ジェネレータ」と名づけた設計プラットフォームを開発した.等価回路ジェネレータはMEMSデバイスの等価回路モデル化もとづいている.これにより回路設計技術者は検出回路や駆動回路を含めた回路システム全体での回路シミュレーションを行うことが可能となる.本稿ではMEMSデバイスの機械的,電気的動作特性を表す等価回路導出手法について述べる.本手法では,エネルギー関数を用いて等価回路を導出する.本手法検証のために静電型櫛歯アクチュエータでの共振特性の実測比較を行った.本手法により導出した等価回路で回路シミュレーションを行い得られたアドミタンス特性は実測値とよく一致した.

In order to improve CMOS-integrated MEMS (micro electromechanical system) devices design efficiency, we developed a design platform, MEMS equivalent circuit generator, based on equivalent circuit model of MEMS devices. By using this design platform, design engineers can simulate complete circuits, including the peripheral circuits such as sensing and driving units. This paper describes equivalent circuit for MEMS for expressing mechanical and electromechanical element within circuit simulation, in order to simulate their dynamic behaviors easily. To obtain equivalent circuits, we have developed the unified procedure that incorporates energy functions. In order to validate this approach, the resonant property of electrostatic comb-drive actuator was simulated using the equivalent circuit generated and measured experimentally. The simulated resonant frequency was in good agreement with the measurement and the admittance characteristics were well described using this circuit.