2208 静電インクジェット現象を利用したマイクロ加工(要旨講演,一般セッション:柔軟媒体ハンドリング/画像形成機器)

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  • 2208 New micro Fabrication Techniques Utilizing Electrostatic Inkjet Phenomena

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Electrostatic inkjet phenomena took place when high voltage was applied between an insulative capillary tube filled with ion conductive liquid and a metal plate electrode. Droplet diameter and dropping frequency were controlled by the voltage application. We developed new micro fabrication techniques using commercial etching liquid based on the electrostatic inkjet phenomena. The first technique was a thinning of metal rod. The diameter of the rod was controlled by the time of voltage application between the capillary tube and the metal rod. The other technique was a drilling on a shin metal sheet. Small holes were punctured on the shin sheet. Hole diameter, some 10 μm to some 100 μm was controlled by the amplitude of applied voltage.

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