21105 ELID研削用ポーラス樹脂砥石の開発(プロセス技術,OS.3 機械工学が支援する微細加工技術(半導体,MEMS,NEMS))

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  • 21105 Development of Microporous Resin Bonded Wheel for ELID Grinding

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We developed a electro conductive resin bonded grinding wheel for ELM grinding. The grinding wheel is composed of electro conductive resin and alumina abrasives. We consider that this wheel can be used as substitution of rubber bonded wheel. In this paper, the electrical dressing characteristics and frictional characteristics were investigated. The following conclusion was obtained; non-conducing layer and deterioration layer are made on the conductive resin wheel surface by electrolysis. On condition of high electrolysis, those layers are thick and its friction coefficient on the wheel surface is high.

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