C211 アルコールCVD法による基板上への単層カーボンナノチューブ生成とその熱的性質の検討(マイクロ・ナノスケールの熱輸送現象III)

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  • C211 Direct Synthesis of Single-walled Carbon Nanotube on substrates and its Thermo Physical Property

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Carbon nanotube has superior characteristics and it is expected for diverse applications. Vertically aligned single-walled carbon nanotubes (VA-SWNT) film can be made on a substrate with high-density nano catalysts particles. This film is expected to apply to reduce the contact resistance because this film possesses an enough thermal conductivity and high stability for erosion and heat on comparing with present silicon grease or something. In this study, VA-SWNT was synthesized on the substrate by using alcohol, and thermal resistance was measured. Consequently, the thermal resistance was about ten times larger than silicon grease with 10 μm thickness.

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