D33 Profile Measurement of Micro-structured Surfaces by Using SPMs(Nano/micro measurement and intelligent instruments)

• GOTO Shigeaki

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

• Asai Takemi

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

• Arai Yoshikazu

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

• Gao Wei

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

抄録

In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.

収録刊行物

• Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21

  Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2009.5 (0), 787-790, 2009

  一般社団法人 日本機械学会

キーワード

• Measurement
• Micro-structured surface
• Nanometrology
• Scanning probe microscope
• Scanning force microscope
• Scanning current microscope

詳細情報

• CRID: 1390282680876341120
• NII論文ID: 110008010338
• DOI: 10.1299/jsmelem.2009.5.787
• ISSN: 24243086
• Web Site: https://www.jstage.jst.go.jp/article/jsmelem/2009.5/0/2009.5_787/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可