MNM-5B-1 Ti基板上に成膜したPZT薄膜による振動発電特性(セッション 5B マイクロエネルギー)

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  • MNM-5B-1 Piezoelectric energy harvesters of PZT films deposited on Ti cantilevers

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We fabricated piezoelectric energy harvesters of PZT thin films on Ti cantilevers. The PZT films were directly deposited on Pt-coated Ti substrates using rf-magnetron sputtering. Although the harvester had a simple cantilever structure without seismic mass, the resonant frequency was as low as 272 Hz because of its thin Ti thickness of 50 μm. Output power had a peak at optimal load resistance of 19 kΩ. When we applied the acceleration of 50 m/s^2 on the harvester, it could generate electric power of 15.7 μW at the resonant frequency without serious damage to PZT/Ti harvesters.

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