309 ケイ素含有DLC被膜の熱電特性評価(OS3-(3)オーガナイズドセッション《環境とエネルギー》)

• 中村 雅史

  茨城大工

• 原口 忠男

  茨城大工

• 五来 信章

  茨城大院

• 内山 賢

  茨城大院

書誌事項

タイトル別名

• 309 Evaluation of Thermoelectric Properties of DLC Films with Silicon

抄録

This paper presents an investigation of the influence of the silicon addition to thermoelectric performance of DLC films on glass substrates using RF plasma CVD method. The DLC films were prepared using methan (CH_4) and hexamethyldisiloxan (HMDSO) concentration from 0% to 100% as the source gas. The respective thermoelectric performance of the DLC films were evaluated and compared. The Seebeck coefficients of the DLC films decreased with increasing the HMDSO concentration at the range from 0% to 50%. However the Seebeck coefficients was identical with 50% the HMDSO concentration increased to 100%. Resistivity of the DLC films was creased with increasing HMDSO concentration at temperatures from 50℃ to 200°C. However, vicinity the room temperature, the specific electrical resistance of the each DLC films were identical. The power factor of the DLC films was decreased with increasing the HMDSO concentration at temperatures from room temperature to 200℃.

収録刊行物

• 茨城講演会講演論文集

  茨城講演会講演論文集 2010.18 (0), 71-72, 2010

  一般社団法人 日本機械学会

キーワード

• Diamond Like Carbon
• Silicon
• Thermoelectric performance
• RF plasma CVD

詳細情報

• CRID: 1390001205854493696
• NII論文ID: 110008745811
• DOI: 10.1299/jsmeibaraki.2010.18.71
• ISSN: 24242683
• Web Site: https://www.jstage.jst.go.jp/article/jsmeibaraki/2010.18/0/2010.18_71/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可