%A SHIH, Hong-An
%A KUDO, Masahiro
%A AKABORI, Masashi
%A SUZUKI, Toshi-kazu
%T Characterization of sputtered AlN amorphous films and their applications to AlGaN/GaN MIS-HFET
%J IEICE technical report. Electron devices
%0 Journal Article
%@ 09135685
%I The Institute of Electronics, Information and Communication Engineers
%D 2011
%8 2011-07-22
%V 111
%N 167
%P 13-16
%U http://ci.nii.ac.jp/naid/110008800751/en/
%R