103 分子動力学シミュレーションによる単結晶シリコンの材料特性に微小欠陥が及ぼす影響に関する研究(OS1-1 オーガナイズドセッション《計算力学と数値シミュレーション》)

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  • 103 Investigation of micro-defect effect on material properties of single crystal silicon based on molecular dynamics simulation

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MEMS and NEMS are very-small devices that are created by semiconductor process technology. Their small size and light weight characteristics are attractive for space application, however, the radiation induced micro-defects tend to be created in space, and those influences should be larger due to their small size, therefore, it is important to investigate the micro-defect effects for precise evaluation of MEMS and NEMS durability. In this study, we performed molecular dynamics (MD) simulations for single-crystal silicon. As a result, we were able to reproduce the behavior of silicon as brittle materials, and we were able to assess the influence on material properties and strength due to micro-defects.

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