G011032 電子顕微鏡観察下における微小構造体の疲労試験に関する研究([G011-03]計算力学部門,一般セッション(3) : 疲労・き裂・欠陥1)

DOI Web Site

書誌事項

タイトル別名
  • G011032 Fatigue testing of micro-structures in the electron microscope under observation

抄録

Recent technical innovations cause expectation of increasing of use of micro electro machining system(MEMS). To increase use of MEMS, advancement of authenticity of is needed. And it needs clarification of fatigue property of micro-structure. In past researches of fatigue property of micro-structure, specimens were not able to be watched during fatigue testing and smaller specimens than 100 micro meters were not able to be tested. To breakthrough those problems, fatigue testing in the scanning electron microscope (SEM) exists. We propose the method for fatigue testing of micro-structure in the SEM. The fatigue testing system for micro-structure is conducted by controlling probe to apply 50 MPa 〜 300 MPa cyclic load to specimen by piezo-actuator, and then amplitude of cyclic load is measured by force-censer. The specimen was made by focused ion beam. The force censer having force resolving power enough to measure cyclic load was made of eddy current censer. The specimen was applied cyclic load in the SEM, and the amplitude it was made by the force censer. We present that our new system for fatigue testing can conduct a fatigue test in the SEM.

収録刊行物

  • 年次大会

    年次大会 2013 (0), _G011032-1-_G011032-4, 2013

    一般社団法人 日本機械学会

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ