J161011 吸引駆動型ポリマーMEMSミラーの駆動特性に関する有限要素解析([J161-01]マイクロナノメカトロニクス(1))

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タイトル別名
  • J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force

抄録

In this paper, we proposed a 2D polymer-MEMS mirror made of negative photoresist SU-8 containing magnetic particles as a magnetically driven actuator. It is important to evaluate the material reliability of a polymer applied for movable structures. So, we analyzed the proposed mirror structure using a finite element analysis based on obtained mechanical and magnetic properties of the used polymer. From the analytical results, the proposed mirror is actuated with the optical deflection angle 20deg. under the fracture stress 40MPa of the composite, and analytical frequency characteristic is similar to the experimental result.

収録刊行物

  • 年次大会

    年次大会 2013 (0), _J161011-1-_J161011-4, 2013

    一般社団法人 日本機械学会

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