634 太陽光の熱利用のための薄膜熱電発電モジュールの作製と評価

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  • 634 Fabrication and evaluation of thin-film thermoelectric solar power generator

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We fabricated thin-film thermoelectric generators and evaluated their generation properties using focused solar light Thin-film thermoelectric elements of Bi_<0.5>Sb_<1.5>Te_<0.3> (p-type) and Bi_2Te_<2.7>Se_<0.3> (n-type), were deposited on glass substrates by radiofrequency magnetron sputtering, and patterned using lift-off techniques After patterning the module, annealing treatment was carried out in a vacuum at 300℃ for 1 h Solar light was focused onto the hot side of the thin-film thermoelectric module with 10 pn junctions using convex lens The focal spot was approximately 2 mm with solar concentration of 156 suns The temperature difference between the hot and cold sides of pn junctions was approximately 90℃ Under this condition, the open circuit voltage and maximum generation power were 245 mV and 1.2 μW, respectively This value of the open circuit voltage of the module was consistent with the calculated value using Seebeck coefficient of thermoelectric thin films and the temperature difference of the module

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