B14 高速非接触加工機上計測によるマルチセグメント中性子反射光学素子の形状測定(OS11 超精密加工)

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  • B14 Profile measurement of multi-segmented neutron reflective mirror using non-contact fast speed on-machine measurement probe

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Neutron analysis technique using neutron focusing mirrors are highly demanded for basic researches of high tensile strength steel sheets, proteins and polymer materials. Although we proposed a new fabricating method of multi-segmented neutron focusing mirrors using metal substrates, it was difficult to measure surface profile precisely. This paper reports a development of non-contact fast speed on-machine measurement probe in order to measure the fabricated mirror profile and results of the profile measurement of super mirrors deposited on polished substrates.

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