10107 PVAロールブラシの摩擦特性に及ぼす表面濡れ性の影響

• 西尾 賢哉

  静大

• 原 義高

  静大院

• 真田 俊之

  静大

• 福永 明

  荏原製作所

• 檜山 浩國

  荏原製作所

書誌事項

タイトル別名

• 10107 Influence of surface wettability on the friction of PVA roller brushes

抄録

In order to gain insight into the mechanisms of polyvinyl acetal (PVA) roller brush cleaning in semiconductor device fabrication, we measure the friction force between two types of roller brushes and several surfaces to evaluate the influence of surface wettability. In addition, contact and water behavior between nodule and surface was observed by high-speed video camera. When the roller brush with four rows nodule scrubs on large contact angle surface, the friction force also shows large value. In addition, the time series of friction force of single nodule also shows the different force curve depending on the surface wettability. High-speed photography indicates that the amount of water seeped out of nodule depends on the surface wettability. We believe that the water behavior during the nodule contacts play an important role for the PVA brush friction.

収録刊行物

• 日本機械学会関東支部総会講演会講演論文集

  日本機械学会関東支部総会講演会講演論文集 2015.21 (0), _10107-1_-_10107-2_, 2015

  一般社団法人 日本機械学会

キーワード

• Post-CMP Cleaning
• PVA Roller Brush
• Surface Wettability
• Friction force
• Water Behavior

詳細情報

• CRID: 1390282680823453568
• NII論文ID: 110009948147
• DOI: 10.1299/jsmekanto.2015.21._10107-1_
• ISSN: 24242691
• Web Site: https://www.jstage.jst.go.jp/article/jsmekanto/2015.21/0/2015.21__10107-1_/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
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