3P2-N06 音響インピーダンス整合したMEMS筋音センサ(感覚・運動・計測(3))

• 青木 亮

  東大

• 金子 智則

  東大

• Minh-Dung Nguyen

  東大

• 高畑 智之

  東大

• 松本 潔

  東大

• 下山 勲

  東大

書誌事項

タイトル別名

• 3P2-N06 MEMS Mechanomyogram Sensor with Acoustic Impedance Matching(Sense, Motion and Measurement (3))

抄録

We have proposed the high sensitive device that can detect high frequency spectrum of mechanomyogram. The study of high frequency spectrum of mechanomyogram has been superficial because such a sensitive transducer has never been developed. Acoustic impedance matching and a differential pressure sensor are the key to solve this problem. We fabricated two sensors to compare frequency characteristic, one with acoustic impedance matching and the other without it. The result of the experiment was that SN ratio of the sensor with acoustic impedance matching was about up to 700 times larger than that of the sensor without acoustic impedance matching. In addition to this, we were able to measure mechanomyogram using the sensor with acoustic impedance matching and found that up to approximately 1 kHz spectrum of mechanomyogram was detected.

収録刊行物

• ロボティクス・メカトロニクス講演会講演概要集

  ロボティクス・メカトロニクス講演会講演概要集 2014 (0), _3P2-N06_1-_3P2-N06_4, 2014

  一般社団法人 日本機械学会

キーワード

• Mechanomyogram
• Acoustic impedance matching
• Piezoresistive cantilever
• Differential pressure sensor

詳細情報

• CRID: 1390282680916356992
• NII論文ID: 110009967406
• DOI: 10.1299/jsmermd.2014._3p2-n06_1
• ISSN: 24243124
• Web Site: https://www.jstage.jst.go.jp/article/jsmermd/2014/0/2014__3P2-N06_1/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可