3P3-2 Effect of Sc concentration on quasi-shear mode electromechanical coupling k'_<15> in c-axis tilted ScAlN films

• Suzuki Masashi

  Grad. School Adv. Sci. Eng., Waseda Univ.

• Yanagitani Takahiko

  Grad. School Adv. Sci. Eng., Waseda Univ.

Bibliographic Information

Other Title

• 3P3-2 c軸傾斜Sc_xAl_<1-x>N薄膜(0<x<0.55)における擬似すべりモード電気機械結合係数

Journal

• Proceedings of Symposium on Ultrasonic Electronics

  Proceedings of Symposium on Ultrasonic Electronics 36 (0), _3P3-2-1_-_3P3-2-2_, 2015-11-05

  Institute for Ultrasonic Elecronics

Details

• CRID: 1390564238044604416
• NII Article ID: 110010015216
• DOI: 10.24492/use.36.0__3p3-2-1_
• ISSN: 24331910
• ISSN: 13488236
• Text Lang: en
• Data Source:
  • JaLC
  • CiNii Articles