E-2-1 静電駆動機構を付与したすきま制御可能な摩擦力顕微鏡プローブの開発(マイクロナノメカトロニクス(2),口頭発表)

• 福澤 健二

  名大

• 高橋 幹人

  名大院

• 伊藤 伸太郎

  名大

• 張 賀東

  名大

書誌事項

タイトル別名

• E-2-1 Development of FFM probe with a electrostatic actuator for gap control

抄録

A probe for gap-controlled friction force microscopy (FFM) is presented. Electrodes were added to both the probe and micro electrode parts and normal electrostatic force was generated for compensation of normal force between the probe and sample. In addition, the probe had a see-saw structure and two actuators were fabricated at both ends of the probe in order to generate attractive and repulsive forces. A probe with about 30-μm electrode gaps were successfully fabricated by separately fabricating the probe and electrode parts with spacer structures and assembling them. Moreover, feasibility of gap control was experimentally confirmed.

収録刊行物

• IIP情報・知能・精密機器部門講演会講演論文集

  IIP情報・知能・精密機器部門講演会講演論文集 2016 "E-2-1-1"-"E-2-1-2", 2016-03-14

  一般社団法人日本機械学会

キーワード

• Friction force microscope
• Electrostatic actuator
• MEMS
• Control
• Measurement

詳細情報

• CRID: 1570854177499961344
• NII論文ID: 110010045016
• NII書誌ID: AA11902117
• 本文言語コード: ja
• データソース種別:
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