Initial growth and texture formation during reactive magnetron sputtering of TiN on Si(111)
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収録刊行物
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- Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
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Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society 20 (3), 583-588, 2002-05
American Institute of Physics
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詳細情報
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- CRID
- 1050282814083666176
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- NII論文ID
- 120000872405
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- NII書誌ID
- AA10635514
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- ISSN
- 07342101
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- HANDLE
- 2261/19
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- 本文言語コード
- en
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- 資料種別
- journal article
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- データソース種別
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- IRDB
- CiNii Articles