硬質セラミックス薄膜の膜厚、膜硬さ、および基材硬さと密着性の関係

The influence of film thickness, substrate hardness, and film hardness on the adhesion of hard ceramic films were examined by a scratch test. Hard films were coated on the various hardness of substrates by the arc-ion-plating. The effect of film thickness and substrate hardness to the adhesion was investigated by using TiN film. The influence of film hardness on the adhesion was examined with TiN, CrN, TiCN, and TiAlN films. The adhesion deteriorated linearly with the increase of film thickness. Higher adhesion was obtained for harder substrates, and it fell with the decrease of substrate hardness, but the fall was saturated in the range lower than 50 HRC. The relation between the film hardness and the adhesion was in inverse proportion, and the adhesion was decreased remarkably with the increase of film hardness.