差動的圧力上昇法による真空材料の放出ガス量の測定

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  • Measurement of Outgassing Rates from Materials by differential pressure rise method
  • サドウテキ アツリョク ジョウショウホウ ニ ヨル シンクウ ザイリョウ ノ ホウシュツ ガスリョウ ノ ソクテイ

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This paper deals with the differential pressure rise method employed to measure the outgassing rates. With this method, measurement errors due to outgassing from the test-dome surface, gas absorption of the test-dome surface and the pumping of the ionization gauge used can be considerably reduced.<BR>Auxiliary experiments were carried out to determine the pumping speed of the gauge used. Under some assumptions, errors, introduced in the outgassing rates measured with the differential pressure rise method, were discussed. For the examples of outgassing datas measured with this method, ones of Viton 'A', Teflon, steatite and porous alumina are presented in this paper. For the standpoint of simplicity and accuracy, it can be concluded that the differential pressure rise method is highly suitable for outgassing measurement at room temperature in respect of nonmetallic materials.

収録刊行物

  • 真空

    真空 13 (1), 23-28, 1970

    一般社団法人 日本真空学会

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