Annealing effect on microstructure of ZnO nano-particulate films and VOC gas sensing property

DOI Web Site 被引用文献3件 参考文献14件
  • SAITO Noriko
    National Institute for Materials Science
  • WATANABE Ken
    National Institute for Materials Science
  • AUBERT Tangi
    National Institute for Materials Science University of Rennes 1, UMR UR1-CNRS 6226 Institut des Sciences Chimiques de Rennes
  • GRASSET Fabien
    University of Rennes 1, UMR UR1-CNRS 6226 Institut des Sciences Chimiques de Rennes
  • SAKAGUCHI Isao
    National Institute for Materials Science
  • HANEDA Hajime
    National Institute for Materials Science

抄録

We synthesized ZnO nano-particulate films by a sol–gel method and evaluated their gas sensing properties. A ZnO colloidal solution of 5.6 nm sized nanocrystals was prepared from zinc acetate in n-propanol and dip-coated on silica glass substrates. The as-deposited ZnO film consisted of 30 nm grains. Annealing the films resulted in a growth of the particles, which was confirmed by scanning probe microscopy and UV–Vis spectrometry. The ZnO film annealed at 400°C worked well as a gas sensor device for volatile organic compounds (VOC) gases. The sensitivity was the best in the case of ethanol gas at 350°C. The sensing performances decreased by annealing at higher temperatures due to the coalescence of the ZnO particles.

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