Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

• Hoh Koichiro

  Electrotechnical Laboratory

• Hirata Masahiro

  Electrotechnical Laboratory

• Atoda Nobufumi

  Electrotechnical Laboratory

• Tanino Hiroshi

  Electrotechnical Laboratory

• Ichimura Shingo

  Electrotechnical Laboratory

• Onuki Hideo

  Electrotechnical Laboratory

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 22 (4), 765-765, 1983

  公益社団法人 応用物理学会

詳細情報

• CRID: 1570291228169400064
• NII論文ID: 130003464442
• ISSN: 00214922
• Web Site: https://jlc.jst.go.jp/DN/JALC/00337473447?from=CiNii
• 本文言語コード: en
• データソース種別:
  • CiNii Articles